Fabrication of low-loss SOI nano-waveguides including BEOL processes for nonlinear applicationsH. Tian, G. Winzer, A. Gajda, K. Petermann, B. Tillack and L. ZimmermannJ. Eur. Opt. Soc.-Rapid Publ., 7 (2012) 12032DOI: https://doi.org/10.2971/jeos.2012.12032
