Comparison of far field characterisation of DOEs with a goniometric DUV-scatterometer and a CCD-based systemMatthias Wurm, Stefanie Bonifer, Bernd Bodermann and Michael GerhardJ. Eur. Opt. Soc.-Rapid Publ., 6 (2011) 11015sDOI: https://doi.org/10.2971/jeos.2011.11015s
