Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanningN. Kumar, O. El Gawhary, S. Roy, S. F. Pereira and H. P. UrbachJ. Eur. Opt. Soc.-Rapid Publ., 8 (2013) 13048DOI: https://doi.org/10.2971/jeos.2013.13048
