Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral rangeThomas Siefke, Kristin Gerold, Svetlana Shestaeva, Pallabi Paul, Shawon Alam, Daniel Franta, Adriana Szeghalmi, Sven Schröder and Stefanie KrokerJ. Eur. Opt. Society-Rapid Publ., 22 1 (2026) 33DOI: https://doi.org/10.1051/jeos/2026036
