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Characterization of subsurface damage in fused silica using non-destructive optical coherence tomography and a destructive approach by iterative plasma jet etching

Samson Frank, Heike Müller, Wei Zhang, Dennis Thelemann, Thomas Arnold and Jens Bliedtner

J. Eur. Opt. Society-Rapid Publ., 22 1 (2026) 21

DOI: https://doi.org/10.1051/jeos/2026015

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