Measurements and modeling of high groove density multilayer gratings for EUV spectral range in classical and conical mountingsAmr Hisham K. Mahmoud, Camélia Takarit, Irene Papagiannouli, Blandine Capitanio, Evgueni Meltchakov, Sébastien de Rossi and Franck DelmotteJ. Eur. Opt. Society-Rapid Publ., 21 2 (2025) 50DOI: https://doi.org/10.1051/jeos/2025047