High-efficiency broadband grating out-coupler for thick silicon waveguides with a tuned SiGe layerSidra Tul Muntaha, Isaac Doughan, Matteo Cherchi, Matthieu Roussey and Timo AaltoJ. Eur. Opt. Society-Rapid Publ., 21 2 (2025) 34DOI: https://doi.org/10.1051/jeos/2025030