An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensingJohannes Belkner, Johannes Leineweber, Georg Hein, Jaqueline Stauffenberg, Alexander Barth, Thomas Kissinger, Eberhard Manske and Thomas FröhlichJ. Eur. Opt. Society-Rapid Publ., 21 1 (2025) 27DOI: https://doi.org/10.1051/jeos/2025017
