Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Normal-Incidence Germanium Photodetectors Integrated with Polymer Microlenses for Optical Fiber Communication Applications

Yu-Hsuan Liu, Chia-Peng Lin, Po-Wei Chen, Chia-Tai Tsao, Chun-Chi Lin, Tsung-Ting Wu, Likarn Wang and Neil Na
Sensors 24 (13) 4221 (2024)
https://doi.org/10.3390/s24134221

Roll-to-roll nanoimprint lithography using a seamless cylindrical mold nanopatterned with a high-speed mastering process

Nichole Cates, Vincent J Einck, Lauren Micklow, et al.
Nanotechnology 32 (15) 155301 (2021)
https://doi.org/10.1088/1361-6528/abd9f1

Monocrystalline Quartz ICP Etching: Road to High-Temperature Dry Etching

Artem A. Osipov, Gleb A. Iankevich and Sergey E. Alexandrov
Plasma Chemistry and Plasma Processing 40 (1) 423 (2020)
https://doi.org/10.1007/s11090-019-10025-6

Fabrication of high fill-factor microlens array using spatially constrained thermal reflow

Jinfeng Qiu, Mujun Li, Huichun Ye, Junjie Zhu and Chao Ji
Sensors and Actuators A: Physical 279 17 (2018)
https://doi.org/10.1016/j.sna.2018.05.039

Development of Process for Fast Plasma-Chemical Through Etching of Single-Crystal Quartz in SF6/O2 Gas Mixture

A. A. Osipov, S. E. Aleksandrov, A. A. Osipov and V. I. Berezenko
Russian Journal of Applied Chemistry 91 (8) 1255 (2018)
https://doi.org/10.1134/S1070427218080025

Fabrication of microlens array with well-defined shape by spatially constrained thermal reflow

Jinfeng Qiu, Mujun Li, Junjie Zhu and Chao Ji
Journal of Micromechanics and Microengineering 28 (8) 085015 (2018)
https://doi.org/10.1088/1361-6439/aabd1d

Effects of 3D microlens transfer into fused silica substrate by CF4/O2 dry etching

Viktoras Grigaliūnas, Dalius Jucius, Algirdas Lazauskas, et al.
Applied Surface Science 393 287 (2017)
https://doi.org/10.1016/j.apsusc.2016.10.024

Broadband Metallic Planar Microlenses in an Array: the Focusing Coupling Effect

Yiting Yu, Ping Wang, Yechuan Zhu and Jinshuai Diao
Nanoscale Research Letters 11 (1) (2016)
https://doi.org/10.1186/s11671-016-1333-9

Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication

Hangyu Liu, Johannes Herrnsdorf, Erdan Gu and Martin D. Dawson
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 34 (2) (2016)
https://doi.org/10.1116/1.4943558

Dense arrays of millimeter-sized glass lenses fabricated at wafer-level

Jorge Albero, Stéphane Perrin, Sylwester Bargiel, et al.
Optics Express 23 (9) 11702 (2015)
https://doi.org/10.1364/OE.23.011702

An Optofluidic Lens Array Microchip for High Resolution Stereo Microscopy

Mayurachat Gulari, Anurag Tripathi, Mostafa Ghannad-Rezaie and Nikos Chronis
Micromachines 5 (3) 607 (2014)
https://doi.org/10.3390/mi5030607

Application of micro solid immersion lens as probe for near-field scanning microscopy

A. C. Assafrao, N. Kumar, A. J. H. Wachters, et al.
Applied Physics Letters 104 (10) (2014)
https://doi.org/10.1063/1.4867460

Fabrication of adhesive lenses using free surface shaping

D. Hoheisel, C. Kelb, M. Wall, B. Roth and L. Rissing
Journal of the European Optical Society-Rapid Publications 8 13065 (2013)
https://doi.org/10.2971/jeos.2013.13065

Experimental and theoretical investigation on the misalignment tolerance of a micron-sized solid immersion lens

A C Assafrao, M-S Kim, A J H Wachters, et al.
Journal of Optics 15 (2) 025706 (2013)
https://doi.org/10.1088/2040-8978/15/2/025706