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Cited article:

Tunable terahertz beam splitter based on programmable liquid crystal integrated metasurface

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https://doi.org/10.1063/5.0307340

Enhanced planarization technology by reactive ion beam etching and using a nanoimprint resist

Lukas P. Lingenfelder, Annemarie Finzel, Gregor Dornberg, Joachim Zajadacz and Frank Frost
Applied Physics A 131 (6) (2025)
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Analysis and experimental study on influencing factors to magnetorheological finishing for ultra-precision optical mirror surfaces

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Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture (2025)
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Ion beam planarization of optical aluminum surfaces

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Journal of Astronomical Telescopes, Instruments, and Systems 6 (01) 1 (2020)
https://doi.org/10.1117/1.JATIS.6.1.014001

Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces

Thomas Arnold, Fred Pietag, Melanie Ulitschka and Jens Bauer
Journal of Astronomical Telescopes, Instruments, and Systems 4 (04) 1 (2018)
https://doi.org/10.1117/1.JATIS.4.4.046003