Articles citing this article

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The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Enhanced planarization technology by reactive ion beam etching and using a nanoimprint resist

Lukas P. Lingenfelder, Annemarie Finzel, Gregor Dornberg, Joachim Zajadacz and Frank Frost
Applied Physics A 131 (6) (2025)
https://doi.org/10.1007/s00339-025-08540-9

Ion beam planarization of optical aluminum surfaces

Melanie Ulitschka, Jens Bauer, Frank Frost and Thomas Arnold
Journal of Astronomical Telescopes, Instruments, and Systems 6 (01) 1 (2020)
https://doi.org/10.1117/1.JATIS.6.1.014001

Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces

Thomas Arnold, Fred Pietag, Melanie Ulitschka and Jens Bauer
Journal of Astronomical Telescopes, Instruments, and Systems 4 (04) 1 (2018)
https://doi.org/10.1117/1.JATIS.4.4.046003