Table 1
Peak fitting results of the obtained XRD profile of electroplated Cu surface.
| (h k l) | 2θχ (°) | d (Å) | Height | Area | Area (%) | FWHM (°) | Crystalline size (nm) |
|---|---|---|---|---|---|---|---|
| (1 1 1) | 43.279 | 2.0888 | 1156 | 15563 | 100.0 | 0.468 | 47 |
| (2 0 0) | 50.831 | 1.8098 | 370 | 6875 | 44.2 | 0.646 | 23 |
| (2 2 0) | 74.076 | 1.2788 | 210 | 4250 | 27.3 | 0.695 | 23 |
| (3 1 1) | 89.877 | 1.0905 | 207 | 4771 | 30.7 | 0.822 | 20 |
| (2 2 2) | 95.099 | 1.0440 | 71 | 1208 | 7.8 | 0.703 | 26 |
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