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Figure 3

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Results of simulations with sample height h = 2 mm and radius r = 50 mm. (a) Potential drop across plasma sheath, (b) and (c) current waveforms for the sample and the open part of the electrode respectively, (d) ion energy distribution (IED), (e) and (f) ion velocity and density waveforms. In (a), (d)–(f) the red-dashed line is for the open electrode path in EEC, and the blue line is for the sample path in EEC.

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