EOSAM 2022
Open Access

Fig. 8


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The real data from the deflectometry metrology system. (top) Live view from the deflectometry camera. (bottom-left) All eight segments are well-aligned against initial co-phasing status. The black line represents the actual size of the single segment. (bottom-right) Successfully detection of segment 3 being drifted from the reference position by tilting angle of 0.006°. (Note: X and Y axis units are in pixels.) [6].

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