Journal of the European Optical Society-Rapid Publications

The impact of O/Si ratio and hydrogen content on ArF excimer laser ablation of fused silica

D. Tasche, C. Gerhard, J. Ihlemann, S. Wieneke and W. Viöl

J. Eur. Opt. Soc.-Rapid Publ., 9 (2014) 14026

Published online: 21 July 2014

DOI: 10.2971/jeos.2014.14026

D. Tasche

C. Gerhard

J. Ihlemann

S. Wieneke

W. Viöl

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