Journal of the European Optical Society-Rapid Publications

Modelling line edge roughness in periodic line-space structures by Fourier optics to improve scatterometry

H. Gross, S. Heidenreich, M-A. Henn, G. Dai, F. Scholze and M. Bär

J. Eur. Opt. Soc.-Rapid Publ., 9 (2014) 14003

Published online: 23 January 2014

DOI: 10.2971/jeos.2014.14003

H. Gross

S. Heidenreich

M-A. Henn

G. Dai

F. Scholze

M. Bär

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