Journal of the European Optical Society-Rapid Publications

Comparison of far field characterisation of DOEs with a goniometric DUV-scatterometer and a CCD-based system

Matthias Wurm, Stefanie Bonifer, Bernd Bodermann and Michael Gerhard

J. Eur. Opt. Soc.-Rapid Publ., 6 (2011) 11015s

Published online: 18 April 2011

DOI: 10.2971/jeos.2011.11015s

Matthias Wurm

Stefanie Bonifer

Bernd Bodermann

Michael Gerhard

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