Journal of the European Optical Society-Rapid Publications

One-step fabrication of polymer components for microphotonics by gray scale electron beam lithography

L. Dong, S. Popov and A.T. Friberg

J. Eur. Opt. Soc.-Rapid Publ., 6 (2011) 11010

Published online: 08 April 2011

DOI: 10.2971/jeos.2011.11010

L. Dong

S. Popov

A.T. Friberg

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