Journal of the European Optical Society-Rapid Publications

Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition

A. Sabac, C. Gorecki, M. Jozwik, L. Nieradko, C. Meunier and K. Gut

J. Eur. Opt. Soc.-Rapid Publ., 2 (2007) 07026

Published online: 16 August 2007

DOI: 10.2971/jeos.2007.07026

A. Sabac

C. Gorecki

M. Jozwik

L. Nieradko

C. Meunier

K. Gut

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