Deterministic measurement and correction of the pad shape in full-aperture polishing processesD. Liao, Q. Zhang, R. Xie, X. Chen, S. Zhao and J. WangJ. Eur. Opt. Soc.-Rapid Publ., 10 (2015) 15049DOI: https://doi.org/10.2971/jeos.2015.15049
