Fourier ellipsometry – an ellipsometric approach to Fourier scatterometryP. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S. F. Pereira, S. Burger and H. P. UrbachJ. Eur. Opt. Soc.-Rapid Publ., 10 (2015) 15002DOI: https://doi.org/10.2971/jeos.2015.15002
