The impact of O/Si ratio and hydrogen content on ArF excimer laser ablation of fused silicaD. Tasche, C. Gerhard, J. Ihlemann, S. Wieneke and W. ViölJ. Eur. Opt. Soc.-Rapid Publ., 9 (2014) 14026DOI: https://doi.org/10.2971/jeos.2014.14026
