Low-loss amorphous silicon waveguides grown by PECVD on indium tin oxideSandro Rao, Francesco G. Della Corte and Caterina SummonteJ. Eur. Opt. Soc.-Rapid Publ., 5 (2010) 10039sDOI: https://doi.org/10.2971/jeos.2010.10039s
