Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour depositionA. Sabac, C. Gorecki, M. Jozwik, L. Nieradko, C. Meunier and K. GutJ. Eur. Opt. Soc.-Rapid Publ., 2 (2007) 07026DOI: https://doi.org/10.2971/jeos.2007.07026
