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Cited article:

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Effects of kinematics and groove parameters on the mid-spatial frequency error of optics induced during full aperture polishing

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Intermediate-frequency error identification of precision optical surface based on the Hilbert spectrum and instantaneous frequency filtering method

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Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing

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Structure and extreme ultraviolet performance of Si/C multilayers deposited under different working pressures

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Deterministic measurement and correction of the pad shape in full-aperture polishing processes

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Analysis of the optic/impurity-particle/pad interaction for reduction of scratches formed on optics during pad polishing

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Characteristics of hydrolyzed layer and contamination on fused silica induced during polishing

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Ceramics International 40 (3) 4479 (2014)
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Optimal strategy for fabrication of large aperture aspheric surfaces

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