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Cited article:

Advanced matrix laser lithography for fabrication of photonic micro-structures

Marek Škereň, Jakub Svoboda, Pavel Fiala

J. Eur. Opt. Soc.-Rapid Publ., 7 (2012) 12043

Published online: 2012-10-31

DOI: https://doi.org/10.2971/jeos.2012.12043

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Experimental and theoretical investigation on the misalignment tolerance of a micron-sized solid immersion lens

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