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Cited article:

Matrixes of unconventional micro-optical components molded with etched silicon

Jorge Albero, Christophe Gorecki, Lukasz Nieradko, Birgit Päivänranta, Virginia Gomez, Hugo Thienpont, Nicolas Passilly

J. Eur. Opt. Soc.-Rapid Publ., 5 (2010) 10001

Published online: 2010-01-17

DOI: https://doi.org/10.2971/jeos.2010.10001

This article has been cited by the following article(s):

Dense arrays of millimeter-sized glass lenses fabricated at wafer-level

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Optics Express 23 (9) 11702 (2015)
https://doi.org/10.1364/OE.23.011702

Simple fabrication of closed-packed IR microlens arrays on silicon by femtosecond laser wet etching

Xiangwei Meng, Feng Chen, Qing Yang, et al.
Applied Physics A 121 (1) 157 (2015)
https://doi.org/10.1007/s00339-015-9402-y

Hugo Thienpont, Jürgen Mohr, Hans Zappe, Hirochika Nakajima, J. Albero, S. Perrin, S. Bargiel, M. Baranski, N. Passilly, L. Gauthier-Manuel and C. Gorecki
9130 91300U (2014)
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A Numerical Model of Wet Isotropic Etching of Silicon Molds for Microlenses Fabrication

M. Baranski, J. Albero, R. Kasztelanic and C. Gorecki
Journal of The Electrochemical Society 158 (11) D681 (2011)
https://doi.org/10.1149/2.079111jes