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Cited article:

Advanced manufacturing techniques for amorphous silicon carbide (a-SiC:H): optimized deposition and etching processes for micro-optical element fabrication

Thomas Handte, Sebastian Bohm, Arne Behrens, Patrick Feßer, Julian Wüster, Marvin Henkel, Steffen Strehle, Erich Runge and Stefan Sinzinger
Optical Materials Express 15 (1) 74 (2025)
https://doi.org/10.1364/OME.539439

Laser processing of chalcogenide glasses using laser fields with a spatially varying polarization distribution

A.P. Porfirev, S.N. Khonina, N.A. Ivliev and D.P. Porfirev
Optics & Laser Technology 167 109716 (2023)
https://doi.org/10.1016/j.optlastec.2023.109716

Approaches for the RCWA-based non-destructive characterization of subwavelength-structured gratings

Julian Wüster, Andreas Reetz, Rüdiger Schmidt-Grund, et al.
EPJ Web of Conferences 266 05012 (2022)
https://doi.org/10.1051/epjconf/202226605012